Title :
UHF CMOS-MEMS bulk acoustic wave resonator
Author :
Giner, J. ; Uranga, A. ; Marigó, E. ; Muñoz-Gamarra, J.L. ; Barniol, N.
Author_Institution :
Electron. Eng. Dept., Univ. Autonoma de Barcelona, Barcelona, Spain
Abstract :
This paper presents a UHF CMOS MEMS resonator working at 384MHz at its bulky mechanical mode. The novel topology proposed allows us to design the resonator taking into account the coupling area of the movable resonator as an important parameter in the design. The structure is fabricated using a commercial CMOS technology. This fact allows to integrate directly the microelectromechanical structure with the electronic. This work presents the measurement of both, the stand alone resonator and the resonator with an amplification circuitry.
Keywords :
CMOS integrated circuits; UHF amplifiers; UHF integrated circuits; UHF resonators; acoustic resonators; bulk acoustic wave devices; micromechanical resonators; UHF CMOS-MEMS bulk acoustic wave resonator; amplification circuit; bulky mechanical mode; coupling area; frequency 384 MHz; movable resonator; stand alone resonator; CMOS integrated circuits; Capacitance; Couplings; Metals; Micromechanical devices; Optical resonators; Resonant frequency;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977861
