Title :
Extreme pressure-sensitive cuts for surface acoustic waves in α-quartz
Author :
Taziev, R.M. ; Kolosovsky, E.A. ; Kozlov, A.S.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
Abstract :
The influence of external static forces on the SAW velocity is computed in a case of circular plates (membranes). Pressure and radial in-plane stress sensitivities of the SAW velocity at any point on the surface of thin membrane as a function of α-quartz crystal anisotropy are presented by sensitivity contour mapping from two independent variables. Direction of the SAW propagation and cut angles of α-quartz substrate. Both pressure loading and radial inplane symmetrical force loading theoretical sensitivity values are compared with experimental ones in the case of circular (membrane) plates. Both experimental and theoretical results are in good agreement
Keywords :
acoustic wave propagation; membranes; piezoelectric materials; quartz; substrates; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic waves; α-quartz; SAW propagation; SAW velocity; SiO2; circular plates; crystal anisotropy; cut angles; external static forces; membranes; pressure loading; pressure-sensitive cuts; radial in-plane stress sensitivities; radial inplane symmetrical force loading; sensitivity contour mapping; substrate; surface acoustic waves; thin membrane; Acoustic propagation; Acoustic waves; Biomembranes; Boolean functions; Capacitive sensors; Data structures; Equations; Frequency; Stress; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1945-1
DOI :
10.1109/FREQ.1994.398313
