Title :
An automated wafer-handling system based on the integrated circuit equipments
Author :
Ming, Cong ; Yumin, Zhou ; Ying, Jiang ; Renke, Kang ; Dongming, Guo
Author_Institution :
Sch. of Mech. Eng., Dalian Univ. of Technol.
Abstract :
Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented
Keywords :
industrial manipulators; integrated circuit manufacture; manipulator kinematics; position control; automated wafer-handling system; end rotation component; end-effector calibration system; integrated circuit equipments; kinematics analysis; radial linear stretch component; wafer positioning system; Calibration; Computer aided manufacturing; Constitution; Educational technology; Integrated circuit reliability; Integrated circuit technology; Manufacturing automation; Optical computing; Robot kinematics; Robotics and automation;
Conference_Titel :
Robotics and Biomimetics (ROBIO). 2005 IEEE International Conference on
Conference_Location :
Shatin
Print_ISBN :
0-7803-9315-5
DOI :
10.1109/ROBIO.2005.246270
