Title :
A perturbation method for modelling the thermal sensitivity of surface transverse wave (STW) propagation on a piezoelectric substrate
Author :
Ballandras, S. ; Gavignet, E. ; Bigler, E.
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France
Abstract :
A perturbation method has been developed in order to correctly predict the sensitivity of surface transverse waves (STW) to quasi-static temperature effects. This approach is based on the coupling of unperturbed STW characteristics and thermoelastic properties of the substrate. The unperturbed STW parameters are calculated taking piezoelectricity into account for propagation under shallow grooves and thin metal strips. An analytical expression of the first order temperature coefficient is obtained in the case of grooves. Finite element analysis has been used for the case of metal strips deposited on crystalline substrate submitted to slow temperature variations. The validity of the results presented is carefully analysed and comparisons with available experimental data are discussed
Keywords :
finite element analysis; perturbation techniques; piezoelectric devices; piezoelectricity; substrates; surface acoustic waves; thermal stresses; thermoelasticity; variational techniques; boundary conditions; coupling; finite element analysis; first order temperature coefficient; grooves; metal strips; perturbation method; piezoelectric substrate; piezoelectricity; quasi-static temperature effects; sensitivity; shallow grooves; surface transverse wave propagation; thermal sensitivity; thermoelastic properties; thin metal strips; unperturbed STW characteristics; Acoustic propagation; Finite element methods; Frequency; Perturbation methods; Piezoelectricity; Predictive models; Strips; Surface waves; Temperature sensors; Thermal stresses;
Conference_Titel :
Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1945-1
DOI :
10.1109/FREQ.1994.398338
