DocumentCode :
2668189
Title :
Decomposition Of CCL/sub 4/ In An E-beam Reactor
Author :
Bromberg, Leslie ; Cohn ; Ko, Mei-Ju ; Patrick, R.M. ; Thomas, Paul
Author_Institution :
Massachusetts Institute of Technology
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
167
Lastpage :
167
Keywords :
Atomic beams; Atomic measurements; Gas lasers; Inductors; Laser ablation; Laser theory; Plasma materials processing; Plasma measurements; Plasma temperature; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697978
Filename :
697978
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2668189
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