• DocumentCode
    2668189
  • Title

    Decomposition Of CCL/sub 4/ In An E-beam Reactor

  • Author

    Bromberg, Leslie ; Cohn ; Ko, Mei-Ju ; Patrick, R.M. ; Thomas, Paul

  • Author_Institution
    Massachusetts Institute of Technology
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    167
  • Lastpage
    167
  • Keywords
    Atomic beams; Atomic measurements; Gas lasers; Inductors; Laser ablation; Laser theory; Plasma materials processing; Plasma measurements; Plasma temperature; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697978
  • Filename
    697978
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2668189