• DocumentCode
    2668244
  • Title

    Excimer Laser Ablation Processing Of Materials In Gas And Plasma Environments

  • Author

    Ching, C.H. ; Ventzek, P.L.G. ; Gilgenbach, Ronald M. ; Lindley, R.A.

  • Author_Institution
    University of Michigan
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    167
  • Lastpage
    167
  • Keywords
    Atomic beams; Atomic measurements; Gas lasers; Laser ablation; Laser theory; Optical materials; Plasma materials processing; Plasma measurements; Plasma temperature; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697979
  • Filename
    697979
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2668244