Title :
Optical Diagnostics Of Copper Vapor Laser Machining Of Polymers
Author :
Ventzek, P.L.G. ; Gilgenbach, Ronald M. ; Ching, C.H. ; Lindley, R.A. ; McColl, W.B.
Author_Institution :
The University of Michigan
Keywords :
Acoustic beams; Copper; Electrodes; Etching; Machining; Optical polymers; Plasma materials processing; Plasma properties; Plasma sheaths; Superconducting magnets;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697980
