Robust process capability index tracking for process qualification

This paper presents a robust process qualification and monitoring procedure based on the recently developed YAT and YWL process capability indices. Combined with appropriate test structures and measurements the procedure enables rapid process maturity evaluation and on-going loop closure of manufacturing to process specifications. The procedure generates interactive web-based reports and data that provide high-level “scoring” and a time-line of process capability, an ability to quickly dive down and identify the root cause of issues, and capability to compare between fabs.