DocumentCode
2669773
Title
Optical Metrology For MR Heads
Author
Al-Jumaily, G. ; Kief, M.T. ; Mowry, G.S.
Author_Institution
Seagate Technology
fYear
1997
fDate
1-4 April 1997
Keywords
Light scattering; Metrology; Optical films; Optical refraction; Optical scattering; Optical surface waves; Pollution measurement; Rough surfaces; Surface roughness; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location
New Orleans, LA, USA
Print_ISBN
0-7803-3862-6
Type
conf
DOI
10.1109/INTMAG.1997.597835
Filename
597835
Link To Document