Title :
Optical Metrology For MR Heads
Author :
Al-Jumaily, G. ; Kief, M.T. ; Mowry, G.S.
Author_Institution :
Seagate Technology
Keywords :
Light scattering; Metrology; Optical films; Optical refraction; Optical scattering; Optical surface waves; Pollution measurement; Rough surfaces; Surface roughness; Thickness measurement;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.597835
