DocumentCode
2670094
Title
Impact of deep trench isolation on advanced SiGe HBT reliability in radiation environments
Author
Phillips, Stanley D. ; Sutton, Akil K. ; Appaswamy, Aravind ; Bellini, Marco ; Cressler, John D. ; Grillo, Alex ; Vizkelethy, Gyorgy ; Dodd, Paul ; McCurdy, Mike ; Reed, Robert ; Marshall, Paul
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2009
fDate
26-30 April 2009
Firstpage
157
Lastpage
164
Abstract
We investigate, for the first time, the impact of deep trench isolation on the total ionizing dose (TID) and single event upset (SEU) tolerance of advanced SiGe HBTs. We employ a combination of 63 MeV protons, 10 keV X-rays, and 36 MeV oxygen ion microbeam irradiation and compare a 3rd generation, high-performance (HP), deep-trench isolated, SiGe BiCMOS platform with its cost-performance (CP) variant without deep-trenches. Although the CP SiGe HBTs are shown to be more susceptible to TID damage, the elevated damage is not attributed to variations in deep trench isolation (DTI), but to spacer oxide differences. CP SiGe HBTs are surprisingly found to offer a potential built-in self-mitigation mechanism for SEU, which is a direct result of the influence of the deep trench isolation on the charge collection dynamics associated with ion strikes. Calibrated, full 3D ion strike TCAD simulations are employed to explain the results, revealing substantial enhancement of radial charge diffusion for structures implemented with little to no deep trench. Mitigation of charge collection events are found to occur for emitter-center strikes for devices with limited/eliminated DTI with the caveat of larger collection for outside-DTI ion strikes.
Keywords
BiCMOS integrated circuits; Ge-Si alloys; X-ray effects; heterojunction bipolar transistors; isolation technology; proton effects; semiconductor materials; 3D ion strike TCAD simulations; BiCMOS platform; HBT; SiGe; X-ray irradiation; charge collection dynamics; deep trench isolation; electron volt energy 10 keV; electron volt energy 36 MeV; electron volt energy 63 MeV; emitter-center strikes; oxygen ion microbeam irradiation; proton irradiation; radial charge diffusion; self-mitigation mechanism; single event upset; spacer oxide; total ionizing dose; BiCMOS integrated circuits; Diffusion tensor imaging; Germanium silicon alloys; Heterojunction bipolar transistors; Ionizing radiation; Isolation technology; Silicon germanium; Single event upset; Space technology; Temperature; Deep Trench Isolation; HBT; SEE; SEU; SiGe; Silicon-Germanium Technology; Total Ionizing Dose;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2009 IEEE International
Conference_Location
Montreal, QC
ISSN
1541-7026
Print_ISBN
978-1-4244-2888-5
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2009.5173244
Filename
5173244
Link To Document