Title :
Non-adiabatic nanometric near-field optical chemical vapor deposition using visible light for ultraviolet metal-organic gas source
Author :
Kawazoe, T. ; Kobayashi, K. ; Takubo, S. ; Ohtsu, M.
Author_Institution :
Exploratory Res. for Adv. Technol., Japan Sci. & Technol. Corp., Machida, Japan
Abstract :
Photodissociation using optical near field of diethylzinc becomes non-adiabatic due to the steep spatial gradient of optical power. Therefore, diethylzinc becomes active even for visible light, although it is active only for UV propagating light.
Keywords :
chemical vapour deposition; optical fabrication; organic compounds; photodissociation; visible spectra; diethylzinc; nonadiabatic near-field optical chemical vapor deposition; photodissociation; ultraviolet metal-organic gas source; visible light; Atom optics; Chemical technology; Chemical vapor deposition; Integrated optics; Nanoscale devices; Optical buffering; Optical device fabrication; Optical devices; Probes; Zinc;
Conference_Titel :
Quantum Electronics and Laser Science, 2003. QELS. Postconference Digest
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-749-0
DOI :
10.1109/QELS.2003.238579
