DocumentCode :
2670259
Title :
Remote ECR Plasma Deposition Of Diamond Thin Films From Water-Methanol mixtures
Author :
Buckle, K.A. ; Koba, R. ; Rodgers, Jeremy
Author_Institution :
University of South Florida
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
172
Lastpage :
172
Keywords :
Computer simulation; Electrons; Kinetic energy; Liquids; Neutrons; Plasma materials processing; Plasma properties; Plasma simulation; Plasma temperature; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697990
Filename :
697990
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2670259
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