Title :
Study of the effect of nanofabricated surface roughness on conductivity in the terahertz regime with a high-Q resonator
Author :
Yang, Benjamin B. ; Kirley, Matt ; Booske, John H.
Author_Institution :
ECE Dept., Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
A high-Q quasi-optical resonator operating at 400 GHz and 650 GHz is used to measure the conductivity of metal samples with nano-scale textures made using a LIGA-like nanoimprinting process. The results explore the effect of surface roughness on effective conductivity in the terahertz regime.
Keywords :
LIGA; electrical conductivity; nanofabrication; nanolithography; optical resonators; surface roughness; LIGA-like nanoimprinting; frequency 400 GHz; frequency 650 GHz; high-Q quasioptical resonator; metal sample conductivity; nanofabricated surface roughness; nanoscale texture; terahertz regime; Conductivity; Conductivity measurement; Gratings; Rough surfaces; Surface roughness; Surface topography; Surface treatment;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104794
