Characterization of threshold voltage instability after program in charge trap flash memory

We investigated threshold voltage shifts after program pulse in charge trap flash memory by measuring drain current changes. We have found threshold voltage shifts can be characterized as a function of not only the materials of tunnel oxide, trap layer, blocking layer, but also physical parameters like device size and electrical measurement environment such as program voltage target and gate bias voltage. This approach can identify the root cause of initial threshold voltage shifts in charge trap flash memory devices.