DocumentCode
2670509
Title
Three bits per cell floating gate NAND flash memory technology for 30nm and beyond
Author
Nitta, H. ; Kamigaichi, T. ; Arai, F. ; Futatsuyama, T. ; Endo, M. ; Nishihara, N. ; Murata, T. ; Takekida, H. ; Izumi, T. ; Uchida, K. ; Maruyama, T. ; Kawabata, I. ; Suyama, Y. ; Sato, A. ; Ueno, K. ; Takeshita, H. ; Joko, Y. ; Watanabe, S. ; Liu, Y. ;
Author_Institution
Toshiba Corp., Yokohama, Japan
fYear
2009
fDate
26-30 April 2009
Firstpage
307
Lastpage
310
Abstract
Three bits per cell NAND Flash Memory Technology for 30 nm and beyond has been successfully developed with floating gate technology. Tight natural Vth distribution, wide program/erase window, and good cell reliability such as program disturb, endurance and data retention are obtained. 8 level Vth distributions are successfully demonstrated.
Keywords
NAND circuits; flash memories; logic gates; nanoelectronics; reliability; NAND flash memory technology; cell reliability; data retention; floating gate technology; size 30 nm; Dielectric constant; Digital audio players; Digital cameras; Displays; Electrodes; Nonvolatile memory; Silicides; Silicon compounds; Solid state circuits; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2009 IEEE International
Conference_Location
Montreal, QC
ISSN
1541-7026
Print_ISBN
978-1-4244-2888-5
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2009.5173269
Filename
5173269
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