Title :
Fabrication of hyperboloid-drum structures for sub micro- to nano-meter sized emitters
Author :
Jun-Youn Kim ; Sung-jae, An. ; Jungyeon Kim ; O´Dae Kwon
Author_Institution :
Dept. of Electron. & Electr. Eng., Pohang Sci. & Technol. Univ., South Korea
Abstract :
We report characteristics of newly devised hyperboloid-drum structures to reduce the active layer diameter to sub micro-meter while maintaining the wide area for easy electrode connection. The active layer diameters, the etched-waist of /spl sim/ 8 /spl mu/m-tall hyperboloid-drum, can be adjusted down to /spl sim/ 100 nm.
Keywords :
nanotechnology; semiconductor lasers; hyperboloid-drum structure fabrication; nanometer sized emitters; semiconductor laser; submicrometer sized emitters; Chemical lasers; Distributed Bragg reflectors; Electrodes; Etching; Fabrication; Planarization; Polyimides; Quantum dot lasers; Semiconductor lasers; Shape;
Conference_Titel :
Quantum Electronics and Laser Science, 2003. QELS. Postconference Digest
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-749-0
DOI :
10.1109/QELS.2003.237812
