DocumentCode

2671243

Title

A Study Of Chlorine-containing Flamm Etching Discharges Using a Monte Carlo-Fluid Hybrid Model

Author

Sommerer, T.J. ; Kushner, Mark J.

Author_Institution

University of Illinois

fYear

1993

fDate

1-3 June 1993

Firstpage

179

Lastpage

179

Keywords

Electrodes; Electrons; Etching; Helium; Monte Carlo methods; Plasma applications; Plasma density; Plasma properties; Production; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on

Conference_Location

Tampa, FL, USA

Print_ISBN

0-7803-0716-X

Type

conf

DOI

10.1109/PLASMA.1992.698005

Filename

698005