Ion Energy Distributions In Multicomponent

Author

Hwang, Helen H. ; Sommerer, T.J. ; Kushner, Mark J.

Author_Institution

University of Illinois

fYear

1993

fDate

1-3 June 1993

Firstpage

179

Lastpage

179

Keywords

Argon; Electrodes; Electrons; Fabrication; Microelectronics; Plasma measurements; Radio frequency; Substrates; Surface discharges; Tellurium;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on

Conference_Location

Tampa, FL, USA

Print_ISBN

0-7803-0716-X

Type

DOI

10.1109/PLASMA.1992.698006

Filename

698006

Link To Document