Title :
A Study Of Microscopic Plasma-particle Interactions In glow Discharges
Author :
Seung J.Choi ; Hwang, H.W. ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Electrons; Glow discharges; Microscopy; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma transport processes; Plasma x-ray sources; Switches;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.698007