DocumentCode :
2671273
Title :
A Study Of Microscopic Plasma-particle Interactions In glow Discharges
Author :
Seung J.Choi ; Hwang, H.W. ; Kushner, Mark J.
Author_Institution :
University of Illinois
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
180
Lastpage :
180
Keywords :
Electrons; Glow discharges; Microscopy; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma transport processes; Plasma x-ray sources; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.698007
Filename :
698007
Link To Document :
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