• DocumentCode
    2671705
  • Title

    A frequency agile floating-patch MEMS antenna for 42 GHz applications

  • Author

    Cho, Yong H. ; Kahng, Sung-Tek ; Choi, Wonkyu ; Ha, Man-Lyun ; Pyo, C. ; Kwon, Young-Se

  • Author_Institution
    Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea
  • fYear
    2005
  • fDate
    3-8 July 2005
  • Firstpage
    512
  • Abstract
    A novel frequency agile floating-patch MEMS (micro-electro-mechanical system) antenna is proposed for 42 GHz applications. The floating-patch MEMS antenna is fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.
  • Keywords
    antenna radiation patterns; electromagnetic wave reflection; micromachining; micromechanical devices; microstrip antennas; millimetre wave antennas; silicon; substrates; 42 GHz; Si; floating-patch antenna; frequency agile antenna; frequency agile floating-patch MEMS antenna; high resistivity silicon substrate; integrated antenna; radiation patterns; reflection coefficients; surface micromachining technology; Antenna measurements; Antenna radiation patterns; Broadband antennas; Dielectric substrates; Frequency; Hydrogen; Micromachining; Micromechanical devices; Microstrip antennas; Reflection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas and Propagation Society International Symposium, 2005 IEEE
  • Print_ISBN
    0-7803-8883-6
  • Type

    conf

  • DOI
    10.1109/APS.2005.1551367
  • Filename
    1551367