CMOS digital control circuit for MEMS switch based phased array antenna

A CMOS digital microcircuit, utilizing 0.50 micron technology, was designed for the purpose of providing control circuitry to an array of high-voltage microelectromechanical system (MEMS) switch based phase shifter devices. The eventual grid of MEMS switch devices will be utilized to create a phased element array of antennas for many possible military and commercial applications. The phase of each element of the array will be controlled via the CMOS microcircuit. The paper presents the design, physical layout. and the simulation program with integrated circuit emphasis (SPICE) simulated test results for the CMOS digital control circuit that has been submitted to the MOSIS integrated circuit fabrication service for fabrication.