Title :
Highly precise parameter extraction of thin multi-layers in THz transmission and reflection geometry
Author :
Brahm, A. ; Weigel, A. ; Riehemann, S. ; Notni, G. ; Tünnermann, A.
Abstract :
We present an algorithm operating in THz time-domain that enables us to determine unknown optical parameters of multi-layer systems. We investigated the algorithm with different multi-layer samples measured in THz transmission and reflection.
Keywords :
optical multilayers; pulse measurement; terahertz spectroscopy; THz reflection geometry; THz time-domain spectroscopy; THz transmission geometry; optical parameter; pulse measurement; thin multilayer parameter extraction; Reflection; Refractive index; Resists; Silicon; Thickness measurement; Time domain analysis; Transfer functions;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104869
