Title :
Why is oxide-trap charge-pumping (OTCP) method appropriate for extracting the radiation-induced traps in mosfet?
Author :
Djezzar, Boualem ; Tahi, Hakim ; Mokrani, Arezki
Author_Institution :
Microelectron. & Nanotechnol. Div., Centre de Dev. des Technol. Av. (CDTA), Algiers, Algeria
Abstract :
Oxide-trap charge-pumping (OTCP) method is used to estimate radiation-induced oxide-, interface-, and border-traps in complementary N- and P-MOS transistors. We conduct a critical comparison between OTCP and classical methods like subthreshold slope (STS), mid gap (MG), dual-transistor charge-pumping (DTCP), and dual-transistor border-trap (DTBT). On the one hand, OTCP offers more accurate densities of radiation-induced interface-traps (DeltaNit) and border-traps (DeltaNbt), while STS and MG overestimate DeltaNit because both interface- and border-trap are sensed like interface-traps. On the other hand, OTCP estimates DeltaNit, DeltaNbt, and radiation-induced oxide-trapped positive charge (DeltaNot) for N- and P-MOS separately, whereas DTCP and DTBT give average densities for both devices.
Keywords :
MOSFET; interface states; radiation effects; MOSFET; complementary N-MOS transistors; complementary P-MOS transistors; dual-transistor border-trap; dual-transistor charge-pumping; oxide-trap charge-pumping method; radiation-induced border traps; radiation-induced interface traps; radiation-induced oxide traps; subthreshold slope; Charge pumps; Density measurement; Extrapolation; MOS devices; MOSFET circuits; Microelectronics; Nanotechnology; Production; Radiation effects; Sociotechnical systems; Extraction methods; MOS devices; border-trap; interface-trap; oxidetrap; radiation effect;
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2009.5173349