Title :
Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors
Author :
Sheng, Lieyi ; Snyder, Eric ; Doub, Jason ; Berti, Valerie ; Kriner, Levi ; Glines, Eddie
Author_Institution :
ON Semicond., Pocatello, ID, USA
Abstract :
The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped defects. The improved process which reduces the risk of nanowhiskers is confirmed by in-line optical monitoring in production.
Keywords :
MIM devices; capacitors; condition monitoring; nanotechnology; charge accumulation; field enhancement; in-line optical monitoring; metal-insulator-metal capacitors; nanoampere current injection; nanotipped defects; nanowhisker; passive voltage; unique electrical characterization; Dielectrics; Electron emission; MIM capacitors; Metal-insulator structures; Monitoring; Optical saturation; Pattern analysis; Production; Scanning electron microscopy; Tin;
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2009.5173355
