DocumentCode :
2671971
Title :
Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors
Author :
Sheng, Lieyi ; Snyder, Eric ; Doub, Jason ; Berti, Valerie ; Kriner, Levi ; Glines, Eddie
Author_Institution :
ON Semicond., Pocatello, ID, USA
fYear :
2009
fDate :
26-30 April 2009
Firstpage :
808
Lastpage :
809
Abstract :
The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped defects. The improved process which reduces the risk of nanowhiskers is confirmed by in-line optical monitoring in production.
Keywords :
MIM devices; capacitors; condition monitoring; nanotechnology; charge accumulation; field enhancement; in-line optical monitoring; metal-insulator-metal capacitors; nanoampere current injection; nanotipped defects; nanowhisker; passive voltage; unique electrical characterization; Dielectrics; Electron emission; MIM capacitors; Metal-insulator structures; Monitoring; Optical saturation; Pattern analysis; Production; Scanning electron microscopy; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
ISSN :
1541-7026
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
Type :
conf
DOI :
10.1109/IRPS.2009.5173355
Filename :
5173355
Link To Document :
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