Title :
Effects of photoinduced carrier injection on timedependent dielectric breakdown
Author :
Atkin, J.M. ; Laibowitz, R.B. ; Heinz, T.F. ; Lloyd, J.R. ; Shaw, T.M. ; Cartier, E.
Author_Institution :
Depts. of Phys. & Electr. Eng., Columbia Univ., New York, NY, USA
Abstract :
Time-dependent dielectric breakdown experiments were performed under broadband UV illumination in order to investigate the effects of increased electron concentration on time to breakdown. Preliminary results show that breakdown can be achieved at shorter time scales and lower fields than in standard reliability tests.
Keywords :
electric breakdown; reliability; ultraviolet radiation effects; broadband UV illumination; photoinduced carrier injection; reliability; time-dependent dielectric breakdown; Dielectric breakdown; Dielectric materials; Electric breakdown; Electrodes; Electrons; Life estimation; Materials reliability; Metal-insulator structures; Physics; Testing; breakdown; low-k; reliability;
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2009.5173365
