Title :
Automatic fault location using E-beam and LSI testers
Author :
Itazaki, Noriyoshi ; Sumioka, Tetsuji ; Kajihara, Seiji ; Kinoshita, Kozo
Author_Institution :
Dept. of Appl. Phys., Osaka Univ., Suita, Japan
Abstract :
In this paper, we propose a method for locating faults using an E-beam tester together with a conventional LSI tester. This method applies the fault analysis method using vector pairs by Cox and Rajski to the analysis and diagnosis using E-beam tester. Since an accurate observation of VLSI is possible by E-beam probing, high fault coverage with a few observation time can be attained
Keywords :
VLSI; automatic testing; electron beam applications; electron beam testing; fault diagnosis; fault location; integrated circuit testing; integrated logic circuits; logic testing; Cox; E-beam probing; E-beam tester; LSI testers; Rajski; VLSI; automatic fault location; combinational circuit; fault analysis; fault coverage; vector pairs; Automatic testing; Circuit faults; Circuit testing; Combinational circuits; Data mining; Fault diagnosis; Fault location; Information analysis; Large scale integration; Very large scale integration;
Conference_Titel :
Test Symposium, 1993., Proceedings of the Second Asian
Conference_Location :
Beijing
Print_ISBN :
0-8186-3930-X
DOI :
10.1109/ATS.1993.398814
