Title :
Heated microchamber made of LTCC
Author :
Bembnowicz, Pawel ; Golonka, Leszek J. ; Malecha, Karol
Author_Institution :
Wroclaw Univ. of Technol., Wroclaw
Abstract :
This paper presents various methods of designing of heated microchamber based on LTCC (Low Temperature Co-fired Ceramics) and thick film technology. The temperature distribution inside the microchamber is modeled by thermal field simulation. The aim of the work is to obtain heated microchamber characterized by small thermal inertia and uniform distribution of temperature inside. Several various constructions of the chamber are presented.
Keywords :
ceramic packaging; temperature distribution; thermal management (packaging); thick film devices; heated microchamber; low temperature cofired ceramics; temperature distribution; thick film technology; Ceramics; Dielectric losses; Lamination; Laser beam cutting; Manufacturing; Photonics; Shape; Temperature distribution; Temperature sensors; Thermal expansion;
Conference_Titel :
Electronics Technology, 2006. ISSE '06. 29th International Spring Seminar on
Conference_Location :
St. Marienthal
Print_ISBN :
1-4244-0551-3
Electronic_ISBN :
1-4244-0551-3
DOI :
10.1109/ISSE.2006.365158
