Title :
Page-wide a-Si:H TFT arrays for electronic printing and copying
Author :
Fennell, L.E. ; Thompson, M.J. ; Tuan, H.C. ; Weisfield, R.
Author_Institution :
Xerox Corp., Palo Alto, CA, USA
Abstract :
Using large-area photolithography and batch fabrication techniques, large-area a-Si:H thin-film transistor (TFT) and sensor arrays can be economically produced. Applications of this technology to electronic printers and electronic copiers are described. Both sonographic and electrographic printing are discussed.<>
Keywords :
MOS integrated circuits; amorphous semiconductors; elemental semiconductors; image sensors; printers; reproduction (copying); silicon; thin film transistors; batch fabrication; copying; electrographic printing; electronic copiers; electronic printers; electronic printing; large-area photolithography; sensor arrays; sonographic printing; Circuits; Electrodes; Head; Lithography; Printers; Printing; Sensor arrays; Substrates; Thin film transistors; Transducers;
Conference_Titel :
Display Research Conference, 1988., Conference Record of the 1988 International
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/DISPL.1988.11302
