Title :
Influence of micro-Golay cell cavity diameter on millimeter-wave detection sensitivity
Author :
Denison, Douglas R. ; Knotts, Michael E. ; Hayden, Harley T. ; Young, Seth L. ; Tsukruk, Vladimir V.
Author_Institution :
Signature Technol. Lab., Georgia Tech Res. Inst., Atlanta, GA, USA
Abstract :
We have experimentally demonstrated millimeter-wave detection using a micro-Golay cell based on a polymer nanocomposite membrane. To form Golay cells, the membrane was placed over an array of cavities ranging in diameter from 80 μm to 800 μm fabricated in a low-resistivity Si substrate by reactive ion etching. Measurements show an NEP of better than 300 nW/√Hz at 100 GHz and a linear scaling of sensitivity with cavity diameter.
Keywords :
filled polymers; microwave photonics; millimetre wave detectors; nanocomposites; photodetectors; sensitivity analysis; Si; broadband photothermal detectors; frequency 100 GHz; microGolay cell cavity diameter; millimeter-wave detection sensitivity; polymer nanocomposite membrane; reactive ion etching; size 80 mum to 800 mum; Arrays; Cavity resonators; Detectors; Measurement by laser beam; Sensitivity; Silicon; Substrates;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104982
