Title :
Investigation on Terahertz waveplate at upper Terahertz band
Author :
Gong, Yandong ; Chen, Zaichun ; Hong, Minghui
Author_Institution :
Inst. for Infocomm Res., Singapore, Singapore
Abstract :
We propose a Terahertz quarter waveplate operating at the upper Terahertz band, it is designed with artificial form birefringence through etching micro-grating structures on the high resistivity silicon by using laser micro-fabrication method.
Keywords :
birefringence; etching; laser materials processing; lithography; microfabrication; microlenses; terahertz waves; birefringence; high resistivity silicon; laser microfabrication method; micrograting structure etching; microlens array lithography; terahertz quarter waveplate; upper terahertz band; Filling; Gratings; Optical losses; Polymers; Silicon;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104986
