Title :
A 0.6 THz quasi-optical detector based on a room microbolometer
Author :
Kang, L. ; Tu, X.C. ; Lu, X.Y. ; Liu, X.H. ; Chen, J. ; Wu, P.H.
Author_Institution :
Sch. of Electron. Sci. & Eng., Nanjing Univ., Nanjing, China
Abstract :
This paper reports the performance of a THz detector with a wide bandwidth based on Nb5N6 microbolometer operated at room temperature. This microbolometer integrated with a planar folded dipole antenna is fabricated on the high resistance Si substrates. The best attainable electrical responsibility of Nb5N6 microbolometer is about -600 V/W. A quasi-optical type detector based on this Nb5N6 microbolometer is constructed, and the result shows a good performance at a range of 0.6THz to 0.7THz.
Keywords :
bolometers; dipole antennas; optical sensors; planar antennas; terahertz wave detectors; Nb5N6; THz detector; electrical responsibility; frequency 0.6 THz to 0.7 THz; planar folded dipole antenna; quasi-optical detector; room microbolometer; temperature 293 K to 298 K; Bandwidth; Broadband antennas; Detectors; Dipole antennas; Immune system; Impedance; Noise;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104990
