Title :
Nondestructive inspection using pulsed terahertz wave
Author :
Kim, Geun-Ju ; Kim, Jung-Il ; Jeon, Seok-Gy ; Kim, Jaehong
Author_Institution :
Center for Pioneering Med.-Phys. Res., Korea Electrotechnol. Res. Inst., Ansan, South Korea
Abstract :
We suggest that THz wave is an alternative tool for the void detection in multilayer semiconductor. We measured the THz pulse using a reflective THz imaging system and obtained THz imaging by signal processing. And, to verify possibility of THz inspection, we compared with ultrasound.
Keywords :
II-VI semiconductors; elemental semiconductors; multilayers; nondestructive testing; signal processing; terahertz wave imaging; voids (solid); wide band gap semiconductors; zinc compounds; Si; THz imaging; ZnTe; multilayer semiconductor; nondestructive inspection; pulsed terahertz wave; signal processing; void detection; Imaging; Inspection; Materials; Measurement by laser beam; Pulse measurements; Semiconductor device measurement; Ultrasonic imaging;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6105023
