Title :
The structure and morphology of Si (111) surface at the initial stages of high temperature copper deposition
Author :
Rogilo, Dmitry I. ; Kosolobov, Sergey S. ; Fedina, Ludmila I. ; Latyshev, Alexander V.
Author_Institution :
Novosibirsk State Univ., Novosibirsk, Russia
Abstract :
Structural and morphological transformations of an atomically clean Si(111) surface at initial stages of copper deposition were studied by in situ ultrahighvacuum reflection electron microscopy. The monatomic steps motion in the step-down direction and the change of the electron microscopy contrast along atomic steps were observed during the submonolayer copper deposition onto the substrate at 850degC. It was shown that the change of the contrast was caused by the formation of Cu/Si(111)-(5times5) reconstruction domains and the shift of monatomic steps was provided by the incorporation of silicon adatoms been generated during the formation of the superstructure.
Keywords :
adsorbed layers; copper; monolayers; silicon; surface phase transformations; surface reconstruction; vacuum deposition; Cu-Si; REM; Si; high temperature copper deposition; in situ ultrahigh vacuum reflection electron microscopy; silicon adatoms; structural transformation; submonolayer copper deposition; surface morphology transformations; surface reconstruction; surface reconstruction domains; surface superstructure; temperature 850 C; Annealing; Atomic layer deposition; Copper; Electron microscopy; Reflection; Silicon; Surface cleaning; Surface morphology; Surface structures; Temperature; Atomic steps; copper; silicon; superstructure;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices, 2009. EDM 2009. International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-4571-4
DOI :
10.1109/EDM.2009.5173926