• DocumentCode
    2675486
  • Title

    The structure and morphology of Si (111) surface at the initial stages of high temperature copper deposition

  • Author

    Rogilo, Dmitry I. ; Kosolobov, Sergey S. ; Fedina, Ludmila I. ; Latyshev, Alexander V.

  • Author_Institution
    Novosibirsk State Univ., Novosibirsk, Russia
  • fYear
    2009
  • fDate
    1-6 July 2009
  • Firstpage
    48
  • Lastpage
    50
  • Abstract
    Structural and morphological transformations of an atomically clean Si(111) surface at initial stages of copper deposition were studied by in situ ultrahighvacuum reflection electron microscopy. The monatomic steps motion in the step-down direction and the change of the electron microscopy contrast along atomic steps were observed during the submonolayer copper deposition onto the substrate at 850degC. It was shown that the change of the contrast was caused by the formation of Cu/Si(111)-(5times5) reconstruction domains and the shift of monatomic steps was provided by the incorporation of silicon adatoms been generated during the formation of the superstructure.
  • Keywords
    adsorbed layers; copper; monolayers; silicon; surface phase transformations; surface reconstruction; vacuum deposition; Cu-Si; REM; Si; high temperature copper deposition; in situ ultrahigh vacuum reflection electron microscopy; silicon adatoms; structural transformation; submonolayer copper deposition; surface morphology transformations; surface reconstruction; surface reconstruction domains; surface superstructure; temperature 850 C; Annealing; Atomic layer deposition; Copper; Electron microscopy; Reflection; Silicon; Surface cleaning; Surface morphology; Surface structures; Temperature; Atomic steps; copper; silicon; superstructure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices, 2009. EDM 2009. International Conference and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-4571-4
  • Type

    conf

  • DOI
    10.1109/EDM.2009.5173926
  • Filename
    5173926