Title :
A miniaturized quartz-crystal resonator array for multiple chemical sensing in liquid
Author :
Li, L. ; Guo, N.N. ; Xu, Y.L.
Author_Institution :
Dept. of Electron. & Inf. Eng., ChangChun Univ., Changchun, China
Abstract :
Compared with the common bio-analysis techniques, a miniaturized quartz-crystal resonator array could be the key for low cost sensing system because quartz-crystal resonator is easily miniaturized, and capable of direct chemical sensing in liquids. In this paper, we present a unique fabrication process and application of a miniaturized quartz-crystal resonator array for multiple chemical sensing in liquid.
Keywords :
chemical sensors; crystal resonators; quartz; bioanalysis technique; liquid; miniaturized quartz crystal resonator array; multiple chemical sensing; Arrays; Biology; Cathodes; Gases; Micromechanical devices; Nickel; Polymers; chemical sensing; quartz-crystal resonator array; viscoelastic liquid;
Conference_Titel :
Computer, Mechatronics, Control and Electronic Engineering (CMCE), 2010 International Conference on
Conference_Location :
Changchun
Print_ISBN :
978-1-4244-7957-3
DOI :
10.1109/CMCE.2010.5609851