DocumentCode
2677065
Title
Scanning infrared microscope
Author
Karnaushenko, Dmitriy D. ; Polovinkin, Vladimir G.
Author_Institution
Inst. of the Semicond. Phys., SB RAS, Novosibirsk, Russia
fYear
2009
fDate
1-6 July 2009
Firstpage
323
Lastpage
324
Abstract
In this paper described scanning infrared microscope (SIRM) based on F408 infrared (IR) line spectrometer designed and developed in the ISP SB RAS. An automatically scanning system has been designed and implemented. Optical magnification and spatial resolution for given optical system has been determined. Advantages and disadvantages of SIRM in compare with F401 InAs matrix infrared microscope are also shown.
Keywords
infrared spectroscopy; optical microscopy; F408 infrared line spectrometer; ISP; RAS; SIRM; infrared microscopy; optical magnification; optical system; scanning infrared microscopy; Automatic control; Biomedical optical imaging; Control systems; Infrared detectors; Infrared spectra; Microcontrollers; Microscopy; Optical sensors; Spatial resolution; Spectroscopy; Infrared; SIRM; microscope;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro/Nanotechnologies and Electron Devices, 2009. EDM 2009. International Conference and Seminar on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-4571-4
Type
conf
DOI
10.1109/EDM.2009.5174001
Filename
5174001
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