Title :
Towards substrate removal in quasi-optical Schottky detector arrays
Author :
Casini, R. ; Gaspare, A. Di ; Giovine, E. ; Notargiacomo, A. ; Ortolani, M. ; Bagni, R. ; Carta, S. ; Gaspare, L. Di ; Capellini, G. ; Evangelisti, F. ; Foglietti, V.
Abstract :
The beam of planar THz Schottky detectors is strongly concentrated in the dielectric half-space. With the goal of illuminating arrays from the free-space side, we started to investigate substrate removal from both GaAs and Ge-on-Si diode wafers.
Keywords :
Ge-Si alloys; III-V semiconductors; Schottky diodes; gallium arsenide; optical arrays; submillimetre wave detectors; submillimetre wave diodes; GaAs; dielectric half-space; diode wafers; free-space side; illuminating arrays; planar THz Schottky detectors; quasi-optical Schottky detector arrays; substrate removal; Detectors; Etching; Gallium arsenide; Lenses; Schottky diodes; Silicon; Substrates;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6105164
