ZnO based gas sensor testing

Author

Bakha, Yamna ; Djeridane, Yassine ; Aouimeur, Walid ; Menasri, Lamia ; Smatti, Abderrazak ; Hamzaoui, Saad

Author_Institution

Microelectron. & Nanotechnol. Div., Center for Dev. of Adv. Technol. CDTA, Algiers, Algeria

fYear

2014

fDate

16-18 Dec. 2014

Firstpage

1

Lastpage

3

Abstract

This paper describes and presents an initial test result of ZnO based gas sensor applied to ethanol vapour detection. Intrinsic ZnO and Al (1 %) doped AZO thin films are deposited on SiO₂/Si substrate by spray pyrolysis method with in-situ optimised heater. X-ray diffraction analysis revealed that all the films are polycrystalline with c(002)-axis orientation wurtzite structure normal to the substrate surface. Test sensor detection was performed at operating temperature of 240°C for 100 ppm and 300 ppm of ethanol gas. A net resistance decreasing is obtained in response about three orders of magnitude.

Keywords

II-VI semiconductors; X-ray diffraction; aluminium; crystal orientation; gas sensors; organic compounds; pyrolysis; semiconductor thin films; spray coatings; thin film sensors; zinc compounds; Si; SiO₂-Si; X-ray diffraction analysis; ZnO:Al; ethanol gas detector; ethanol vapour detection; gas sensor testing; in-situ optimised heater; polycrystalline film; spray pyrolysis method; temperature 240 C; wurtzite structure; Ethanol; Films; Gas detectors; Sensitivity; Substrates; Temperature sensors; Zinc oxide; AZO; ZnO; gaz sensor; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Design & Test Symposium (IDT), 2014 9th International

Conference_Location

Algiers

Type

conf

DOI

10.1109/IDT.2014.7038604

Filename

7038604