Abstract :
The following topics are dealt with: biomedical microdevices; gyros & accelerometers; materials and process characterization; fabrication technology; optical & magnetic microdevices; fluidic microdevices; resonant microdevices & sensors; nanodevices; energy harvesting & power; microdevices for cell manipulation; bio-inspired microactuators; resonators & RF MEMS; chemical sensors & systems; bioMEMS; power MEMS; mechanical sensors; medical microsystems; microactuators; microfluidic components and systems; nanoelectromechanical devices; packaging technologies; and physical MEMS.
Keywords :
accelerometers; bioMEMS; biomedical electronics; chemical sensors; energy harvesting; fluidic devices; gyroscopes; microactuators; microfluidics; nanoelectromechanical devices; packaging; RF MEMS; accelerometers; bio-inspired microactuators; bioMEMS; biomedical microdevices; cell manipulation; chemical sensors; energy harvesting; fabrication technology; fluidic microdevices; gyros; magnetic microdevices; mechanical sensors; medical microsystems; microfluidic components; nanodevices; nanoelectromechanical devices; optical microdevices; packaging technology; physical MEMS; power MEMS; resonant microdevices; resonators;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765554
