Program schedule

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

1

Lastpage

58

Abstract

The following topics are dealt with: biomedical microdevices; gyros & accelerometers; materials and process characterization; fabrication technology; optical & magnetic microdevices; fluidic microdevices; resonant microdevices & sensors; nanodevices; energy harvesting & power; microdevices for cell manipulation; bio-inspired microactuators; resonators & RF MEMS; chemical sensors & systems; bioMEMS; power MEMS; mechanical sensors; medical microsystems; microactuators; microfluidic components and systems; nanoelectromechanical devices; packaging technologies; and physical MEMS.

Keywords

accelerometers; bioMEMS; biomedical electronics; chemical sensors; energy harvesting; fluidic devices; gyroscopes; microactuators; microfluidics; nanoelectromechanical devices; packaging; RF MEMS; accelerometers; bio-inspired microactuators; bioMEMS; biomedical microdevices; cell manipulation; chemical sensors; energy harvesting; fabrication technology; fluidic microdevices; gyros; magnetic microdevices; mechanical sensors; medical microsystems; microfluidic components; nanodevices; nanoelectromechanical devices; optical microdevices; packaging technology; physical MEMS; power MEMS; resonant microdevices; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765554

Filename

6765554