• DocumentCode
    267750
  • Title

    Keyword index

  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    1
  • Lastpage
    23
  • Abstract
    Contains an entry for each author and co-author included in this publication.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765556
  • Filename
    6765556
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=267750