Title :
A new method of measuring lead screw with dual-frequency laser interference
Author :
Qi, Xiang-Dong ; Yu, Hai-Li
Author_Institution :
Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China
Abstract :
A new optical structure of measuring lead screw with dual-frequency laser interferometer is proposed, and a formula used quickly correcting Abbe error is deduced in this paper. In the process of testing lead screw, Abbe error in the measured data can be real time compensated, so that the measurement system which doesn´t meet Abbe principle can achieve high measurement accuracy. In addition, this method can also eliminate measurement error induced by axial movement of the measured lead screw. The experimental result shows that of the maximum residual error is only 0.48μm within 300mm stroke after the maximum Abbe error 1.39μm is corrected. This method effectively improves the measurement accuracy of lead screw.
Keywords :
engines; fasteners; light interferometers; measurement systems; Abbe error correction; dual-frequency laser interference; dual-frequency laser interferometer; grating ruling engine; lead screw measurement; optical structure; Argon; Displacement measurement; Gratings; Instruments; Interference; Lead; Motion measurement; Abbe error; dual-frequency laser interferometer; lead screw; ruling engine;
Conference_Titel :
Computer, Mechatronics, Control and Electronic Engineering (CMCE), 2010 International Conference on
Conference_Location :
Changchun
Print_ISBN :
978-1-4244-7957-3
DOI :
10.1109/CMCE.2010.5609897
