A new method of measuring lead screw with dual-frequency laser interference

Author

Qi, Xiang-Dong ; Yu, Hai-Li

Author_Institution

Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China

Volume

6

fYear

2010

fDate

24-26 Aug. 2010

Firstpage

142

Lastpage

144

Abstract

A new optical structure of measuring lead screw with dual-frequency laser interferometer is proposed, and a formula used quickly correcting Abbe error is deduced in this paper. In the process of testing lead screw, Abbe error in the measured data can be real time compensated, so that the measurement system which doesn´t meet Abbe principle can achieve high measurement accuracy. In addition, this method can also eliminate measurement error induced by axial movement of the measured lead screw. The experimental result shows that of the maximum residual error is only 0.48μm within 300mm stroke after the maximum Abbe error 1.39μm is corrected. This method effectively improves the measurement accuracy of lead screw.

Keywords

engines; fasteners; light interferometers; measurement systems; Abbe error correction; dual-frequency laser interference; dual-frequency laser interferometer; grating ruling engine; lead screw measurement; optical structure; Argon; Displacement measurement; Gratings; Instruments; Interference; Lead; Motion measurement; Abbe error; dual-frequency laser interferometer; lead screw; ruling engine;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer, Mechatronics, Control and Electronic Engineering (CMCE), 2010 International Conference on

Conference_Location

Changchun

Print_ISBN

978-1-4244-7957-3

Type

conf

DOI

10.1109/CMCE.2010.5609897

Filename

5609897