Title :
Invar-36 Micro Hemispherical Shell Resonators
Author :
Mehanathan, Nishanth ; Tavassoli, Vahid ; Peng Shao ; Sorenson, Logan ; Ayazi, Farrokh
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We report, for the first time, on the successful fabrication and operational characterization of electroplated Invar Micro-Hemispherical Shell Resonators (μHSR). The heat treatment of the samples and its effect on the quality factor (Q) of the resonators is studied. We show that thermal annealing shifts the coefficient of thermal expansion (CTE) of the alloy towards its minimum of ~2ppm/°C, as a result of which the Q of a 29kHz μHSR with diameter of 780 μm increases at least 3 times and reaches 7500 in vacuum.
Keywords :
Q-factor; annealing; electroplating; micromechanical resonators; thermal expansion; μHSR; Invar-36; coefficient of thermal expansion; electroplated invar; heat treatment; microhemispherical shell resonators; operational characterization; quality factor; thermal annealing; Annealing; Electrodes; Fabrication; Films; Metals; Micromechanical devices;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765568
