Title :
Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution
Author :
Mo Li ; Ng, Eldwin Jiaqiang ; Hong, Vu A. ; Ahn, Chong H. ; Yushi Yang ; Kenny, Thomas W. ; Horsley, David A.
Author_Institution :
Univ. of California, Davis, Davis, CA, USA
Abstract :
This work demonstrates a 3-axis Lorentz force magnetometer for electronic compass purposes. The magnetometer measures magnetic flux in 3 axes using a single structure. With 1 mW power consumption, the sensor achieves sub-30 nT/√Hz resolution in each of the 3 axes. Compared to the 3-axis Hall sensors currently used in smartphones, the 3-axis magnetometer shown here has the advantages of 10× lower noise floor and the ability to be co-fabricated with MEMS inertial sensors.
Keywords :
Hall effect devices; compasses; force measurement; magnetic field measurement; magnetic sensors; magnetometers; microfabrication; microsensors; smart phones; Hall sensors; MEMS inertial sensor; co-fabrication; electronic compass; magnetic flux measurement; power 1 mW; power consumption; single structure Lorentz force magnetometer; smartphones; Lorentz covariance; Magnetic field measurement; Magnetic resonance; Magnetometers; Micromechanical devices; Sensitivity; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765578
