DocumentCode
267788
Title
Near infrared photo-detector using self-assembled formation of organic crystalline nanopillar arrays
Author
Ajiki, Y. ; Kan, Tianze ; Yahiro, Masayuki ; Hamada, Akiko ; Adachi, Jun ; Adachi, C. ; Matsumoto, Kaname ; Shimoyama, Isao
Author_Institution
Microtechnol. R&D Div., Olympus Corp., Japan
fYear
2014
fDate
26-30 Jan. 2014
Firstpage
147
Lastpage
150
Abstract
We proposed a near infrared photo-detector (NIR-PD) using self-assembled formation of organic crystalline arrays, which were formed on an n-type silicon (n-Si) substrate and covered with an Au film. These structures act as antennas for near infrared (NIR) light, resulting in an enhancement of the light absorption on the Au film. The NIR-PDs thus have higher photo-responsivity compared with that of an Au/n-Si typed Schottky diodes, which was fabricated as a reference. In this paper, the fabrication process of the NIR-PDs and the estimation results of photo-responsivity were described. The maximum responsivity to NIR light (wavelength = 1.2 μm) was 1.79 mA/W without applying forward bias. This value is 10 times larger than the responsivity of the Au/n-Si typed Schottky diode as a reference.
Keywords
antenna arrays; elemental semiconductors; gold; infrared detectors; nanofabrication; nanosensors; nanostructured materials; photodetectors; self-assembly; sensor arrays; silicon; thin film sensors; Au-Si; NIR light; NIR-PD; Schottky diode; Si; light absorption enhancement; n-Si substrate; n-type silicon substrate; near infrared light; near infrared photodetector; organic crystalline nanopillar array; photoresponsivity estimation; self-assembled formation; wavelength 1.2 mum; Absorption; Annealing; Films; Gold; Schottky diodes; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location
San Francisco, CA
Type
conf
DOI
10.1109/MEMSYS.2014.6765595
Filename
6765595
Link To Document