Title :
Commercialization of world´s first piezomems resonators for high performance timing applications
Author :
Bhugra, Harmeet ; Seungbae Lee ; Wanling Pan ; Minfan Pai ; Lei, Dian
Author_Institution :
Integrated Device Technol., Inc. (IDT), San Jose, CA, USA
Abstract :
We present in this paper IDT´s efforts and progress in the development and commercialization of world´s first piezoelectric MEMS resonators for high performance timing applications. IDT´s pMEMS™ resonators consist of a piezoelectric material on a single-crystal silicon layer substrate. Based on pMEMS™ technology, IDT is now shipping world´s lowest jitter MEMS Oscillators with less than 0.3ps RMS jitter (12kHz to 20MHz). In addition, pMEMS™ oscillators have demonstrated great long term frequency stability and immunity to shock / vibration testing.
Keywords :
crystal oscillators; micromechanical resonators; timing; frequency 2 kHz to 20 MHz; frequency stability; high performance timing applications; lowest jitter MEMS oscillators; pMEMS resonators; piezoelectric MEMS resonators; shock immunity; vibration testing; Electric shock; Micromechanical devices; Oscillators; Performance evaluation; Resonant frequency; Silicon; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765610
