Title :
Frequency and equivalent circuit constant characteristics versus relative humidity for AT-cut quartz resonators
Author :
Shimamoto, Yoshiro ; Kuroiwa, Mayumi ; Teramoto, Nariaki ; Wakamoto, Satoru ; Imai, Hitoshi ; NAKAZAWA, Mitsuo
Author_Institution :
Fac. of Eng., Shinshu Univ., Nagano, Japan
Abstract :
We propose the use of AT-cut quartz resonators as humidity sensors. This research was conducted experimentally to investigate both nonlinear frequency vs. relative humidity effects and nonlinear equivalent circuit constant vs. relative humidity effects on AT-cut quartz resonators
Keywords :
crystal resonators; equivalent circuits; humidity sensors; AT-cut quartz resonators; SiO2; equivalent circuit constant characteristics; frequency characteristics; high stability; multiple adsorption layers; nonlinear characteristics; quartz humidity sensors; relative humidity; Density measurement; Electrodes; Equations; Equivalent circuits; Friction; Gas detectors; Humidity measurement; Resonant frequency; Sensor phenomena and characterization; Viscosity;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887340
