Title :
A novel quantitative design modeling on gas sensing parameter of nano-materials based on micro-gravimetric thermo-dynamic experiments
Author :
Pengcheng Xu ; Xinxin Li
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
The study is aimed at building a novel quantitative adsorbing/sensing model for chemical gas sensing materials, with which various key sensing parameters can be comprehensively evaluated and optimally designed. Gravimetric resonant-cantilevers are used in experiment to real-time record sensing curves at different temperatures, which are further used to extract adsorbing/sensing performance of the specific materials for quantitative evaluation and optimal design of the sensor. The technique is well validated by choosing the best trimethylamine (TMA) sensing material among three similar mesoporous silica nanoparticles (MSNs).
Keywords :
cantilevers; density measurement; gas sensors; microsensors; nanosensors; nanostructured materials; thermodynamics; MSNs; TMA; chemical gas sensing materials; gravimetric resonant-cantilevers; mesoporous silica nanoparticles; microgravimetric thermodynamic experiments; nanomaterials; quantitative adsorbing-sensing model; quantitative design modeling; real-time record sensing curves; trimethylamine sensing material; Adsorption; Chemicals; Mesoporous materials; Nanoparticles; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765636
