A fuzzy control strategy for flexible micro-cantilever in AFM

Author

Duan, Xiaogang ; Long, Yundong

fYear

2012

fDate

15-17 July 2012

Firstpage

326

Lastpage

330

Abstract

In this paper, a fuzzy PID control method is proposed to control a flexible micro-cantilever in Atomic Force Microscope (AFM). The dynamic property of the flexible micro-cantilever can be approximately described by a Partial Differential Equation (PDE). The PDE can be transformed into finite-dimensional ordinary differential equations (ODEs) by using separation of variables method and truncation theory. For those odes, a fuzzy PID control strategy is presented, where a fuzzy PID controller is designed for an ODE. The fuzzy PID control strategy is applied to control the flexible micro-cantilever. The simulation results demonstrate that the proposed control strategy is effective.

Keywords

atomic force microscopy; cantilevers; control system synthesis; flexible structures; fuzzy control; micromechanical devices; multidimensional systems; partial differential equations; physical instrumentation control; three-term control; AFM; ODE; PDE; atomic force microscope; dynamic property; finite-dimensional ordinary differential equation; flexible microcantilever control; fuzzy PID control method; fuzzy PID controller design; fuzzy control strategy; partial differential equation; separation of variables method; truncation theory; Atomic force microscopy; Force; Mathematical model; PD control; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Information Processing (ICICIP), 2012 Third International Conference on

Conference_Location

Dalian

Print_ISBN

978-1-4577-2144-1

Type

conf

DOI

10.1109/ICICIP.2012.6391560

Filename

6391560