DocumentCode :
2678328
Title :
A fuzzy control strategy for flexible micro-cantilever in AFM
Author :
Duan, Xiaogang ; Long, Yundong
fYear :
2012
fDate :
15-17 July 2012
Firstpage :
326
Lastpage :
330
Abstract :
In this paper, a fuzzy PID control method is proposed to control a flexible micro-cantilever in Atomic Force Microscope (AFM). The dynamic property of the flexible micro-cantilever can be approximately described by a Partial Differential Equation (PDE). The PDE can be transformed into finite-dimensional ordinary differential equations (ODEs) by using separation of variables method and truncation theory. For those odes, a fuzzy PID control strategy is presented, where a fuzzy PID controller is designed for an ODE. The fuzzy PID control strategy is applied to control the flexible micro-cantilever. The simulation results demonstrate that the proposed control strategy is effective.
Keywords :
atomic force microscopy; cantilevers; control system synthesis; flexible structures; fuzzy control; micromechanical devices; multidimensional systems; partial differential equations; physical instrumentation control; three-term control; AFM; ODE; PDE; atomic force microscope; dynamic property; finite-dimensional ordinary differential equation; flexible microcantilever control; fuzzy PID control method; fuzzy PID controller design; fuzzy control strategy; partial differential equation; separation of variables method; truncation theory; Atomic force microscopy; Force; Mathematical model; PD control; Zirconium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Control and Information Processing (ICICIP), 2012 Third International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-4577-2144-1
Type :
conf
DOI :
10.1109/ICICIP.2012.6391560
Filename :
6391560
Link To Document :
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