Title :
Electromagnetic energy harvester with high efficiency using micro-machining Si springs
Author :
Shirai, Tokimasa ; Wakasa, Yuji ; Nakagawa, T. ; Nomura, Keigo ; Yagyu, H.
Author_Institution :
Panasonic Corp., Kadoma, Japan
Abstract :
The direct force input type of electromagnetic energy harvester with significantly high generating efficiency over 40% has been developed. This high efficiency was realized by using the 1mm-thick uniquely-structured Si springs in the harvester, which was fabricated by D-RIE (deep reactive ion etching) from both sides of a 1mm-thick Si wafer. The harvester showed that the peak voltage was 3.7 V and the output energy on the most adequate load resistance was over 1 mJ at an input energy of 2.7 mJ, resulting in a generating efficiency of 41%.
Keywords :
electromagnetic waves; elemental semiconductors; energy harvesting; micromachining; silicon; sputter etching; D-RIE; Si; deep reactive ion etching; electromagnetic energy harvester; energy 1 mJ; energy 2.7 mJ; micromachining Si springs; size 1 mm; voltage 3.7 V; Coils; Force; Magnetomechanical effects; Silicon; Springs; Steel; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765655
