• DocumentCode
    2678484
  • Title

    A new quartz-blank sorting machine including optical and extended X-ray inspection

  • Author

    Berger, Hans ; Bradaczek, H.-A. ; Pianowski, Harald ; Bradaczek, H. ; Hildebrandt, Gerhard

  • Author_Institution
    EFG Int., Berlin, Germany
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    247
  • Lastpage
    249
  • Abstract
    A new multi-task sorting machine (“The Carousel”) for AT-cut quartz blanks has been developed, which enables the simultaneous X-ray angle measurement and X-ray topography on up to four stations placed around one X-ray tube as well as additionally light-optical surface scan and/or other actual checking procedures. From the additional checks, extended criteria for the sorting process can be derived. The throughput is two to four times larger than with the existing angle-sorting machines. The apparatus is constructed as a modular system so that it can be equipped according to the demands of the user. Due to a modified X-ray angle-measuring technique combined with a double-side laser reflection measurement, the orientations of both surfaces of blanks with widths down to 1.5 mm are determined as absolute figures
  • Keywords
    X-ray apparatus; X-ray applications; angular measurement; automatic optical inspection; crystal oscillators; electron device manufacture; 1.5 mm; AT-cut quartz blanks; SiO2; X-ray angle measurement; X-ray topography; X-ray tube; angle-sorting machines; checking procedures; double-side laser reflection measurement; extended X-ray inspection; light-optical surface scan; modified X-ray angle-measuring technique; modular system; multi-task sorting; optical X-ray inspection; quartz-blank sorting machine; Geometry; Goniometers; Inspection; Optical reflection; Position measurement; Sorting; Surface emitting lasers; Surface topography; Throughput; X-ray lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
  • Conference_Location
    Kansas City, MO
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-5838-4
  • Type

    conf

  • DOI
    10.1109/FREQ.2000.887361
  • Filename
    887361