DocumentCode :
2678484
Title :
A new quartz-blank sorting machine including optical and extended X-ray inspection
Author :
Berger, Hans ; Bradaczek, H.-A. ; Pianowski, Harald ; Bradaczek, H. ; Hildebrandt, Gerhard
Author_Institution :
EFG Int., Berlin, Germany
fYear :
2000
fDate :
2000
Firstpage :
247
Lastpage :
249
Abstract :
A new multi-task sorting machine (“The Carousel”) for AT-cut quartz blanks has been developed, which enables the simultaneous X-ray angle measurement and X-ray topography on up to four stations placed around one X-ray tube as well as additionally light-optical surface scan and/or other actual checking procedures. From the additional checks, extended criteria for the sorting process can be derived. The throughput is two to four times larger than with the existing angle-sorting machines. The apparatus is constructed as a modular system so that it can be equipped according to the demands of the user. Due to a modified X-ray angle-measuring technique combined with a double-side laser reflection measurement, the orientations of both surfaces of blanks with widths down to 1.5 mm are determined as absolute figures
Keywords :
X-ray apparatus; X-ray applications; angular measurement; automatic optical inspection; crystal oscillators; electron device manufacture; 1.5 mm; AT-cut quartz blanks; SiO2; X-ray angle measurement; X-ray topography; X-ray tube; angle-sorting machines; checking procedures; double-side laser reflection measurement; extended X-ray inspection; light-optical surface scan; modified X-ray angle-measuring technique; modular system; multi-task sorting; optical X-ray inspection; quartz-blank sorting machine; Geometry; Goniometers; Inspection; Optical reflection; Position measurement; Sorting; Surface emitting lasers; Surface topography; Throughput; X-ray lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
ISSN :
1075-6787
Print_ISBN :
0-7803-5838-4
Type :
conf
DOI :
10.1109/FREQ.2000.887361
Filename :
887361
Link To Document :
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