Flexible micro-supercapacitors from photoresist-derived carbon electrodes on flexible substrates

Author

Mun Sek Kim ; Hsia, B. ; Carraro, C. ; Maboudian, Roya

Author_Institution

Univ. of California, Berkeley, Berkeley, CA, USA

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

389

Lastpage

392

Abstract

This paper reports a simple and scalable technique for the fabrication of flexible micro-supercapacitors. The supercapacitor electrodes are synthesized via the pyrolysis of patterned photoresist on a SiO_2/Si substrate. The electrodes can then be moved to flexible substrates through a simple transfer process. The fabricated devices show excellent energy density of 0.3 mJ/cm², maximum power density of 5 mW/cm², and good performance under electrochemical cycling. The electrochemical performance is maintained after 300 mechanical bending cycles.

Keywords

carbon; electrochemical electrodes; flexible electronics; micromechanical devices; photoresists; pyrolysis; silicon compounds; supercapacitors; SiO₂; electrochemical cycling; energy density; flexible microsupercapacitors; flexible substrates; maximum power density; mechanical bending cycles; patterned photoresist pyrolysis; photoresist-derived carbon electrodes; simple transfer process; supercapacitor electrodes; Capacitance; Carbon; Electrodes; Supercapacitors; Surface impedance; Surface morphology; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765658

Filename

6765658